Lateral Spurious Mode Suppression in Lithium Niobate A1 Resonators

This work presents an improved design that exploits dispersion matching to suppress the spurious modes in lithium niobate first-order antisymmetric (A1) Lamb wave mode resonators. The this is achieved by micro-machining thin film balance electrical and mechanical loadings of electrodes. In article, matchings A1 based on different metals are analytically modeled validated with finite-element analysis. fabricated devices exhibit spurious-free responses a quality factor 692 electromechanical coupling coefficient 28%. demonstrated method herein could overcome significant hurdle currently impeding commercialization devices.